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Magnetrons, reactive gases and sputtering

by Dietrik Depla
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Edition statement:2.ed Published by : Diederik Depla Physical details: VI, 250 p.: ill. ; 23 cm Subject(s): Sputtering | Magnetron | Thin films Year : 2014
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Books Istituto di polarografia ed elettrochimica preparativa IENI1 (Browse Shelf) Available Biblioteca

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