Handbook of sputter deposition technology : principles, technology and applications / ; By Wasa, Kiyotaka

Copyright:1992
ISBN:0815512805
LCCN:TS695.W37
Publisher:Park Ridge : Noyes Publications,
Physical Details: XII, 304 p. : ill. ; 24 cm.
Record No.:17271
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Books edifico 6 Istituto di chimica e tecnologie inorganiche e dei materiali avanzati 2010-04-13 ICTIMA3034