Handbook of sputter deposition technology : principles, technology and applications / ; By Wasa, Kiyotaka
| Copyright: | 1992 |
|---|---|
| ISBN: | 0815512805 |
| LCCN: | TS695.W37 |
| Publisher: | Park Ridge : Noyes Publications, |
| Physical Details: | XII, 304 p. : ill. ; 24 cm. |
| Record No.: | 17271 |
| Type/Format | Call Number | Location | Due Date | Last Seen | Barcode |
|---|---|---|---|---|---|
 Books |
edifico 6 | Istituto di chimica e tecnologie inorganiche e dei materiali avanzati | 2010-04-13 | ICTIMA3034 |