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Magnetrons, reactive gases and sputtering
by
Dietrik Depla
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Edition statement:
2.ed
Published by :
Diederik Depla
Physical details:
VI, 250 p.: ill. ; 23 cm
Subject(s):
Sputtering
|
Magnetron
|
Thin films
Year :
2014
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Istituto di polarografia ed elettrochimica preparativa
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Biblioteca
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