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Pierson, Hugh O.

Handbook of chemical vapor deposition : principles, technology and applications / Hugh O. Pierson - New Jersey : Noyes Publication, c1992 - XXII, 436 p. : ill. ; 24 cm.

ISBN: 0815513003

Subjects--Topical Terms:
chemical vapor deposition
CVD

LC Class. No.: TS695.P52

Dewey Class. No.: 671.7'35-dc20