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Notten, P. H. L.

Etching of III-V semiconductors : an electrochemical approach / P. H. L. Notten, J. E. A. M. van den Meerakker, J. J. Kelly - Oxford : Elsevier Advanced Technology, c1991 - XIV, 349 p. : ill. ; 25 cm.

ISBN: 0946395845

Subjects--Topical Terms:
Semiconductors-Etching
Electrochemistry

LC Class. No.: TK7871.85.N674

Dewey Class. No.: 612.381'52-dc20