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Etching of III-V semiconductors : an electrochemical approach /
by Notten, P. H. L.
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Authors:
Meerakker, J. E. A. M. van der
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Kelly, J. J.
Published by :
Elsevier Advanced Technology,
(Oxford : )
Physical details: XIV, 349 p. : ill. ; 25 cm.
Subject(s):
Semiconductors-Etching
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Electrochemistry
Year : 1991
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| Item type | Location | Call Number | Copy | Status | Notes | Date Due |
|---|---|---|---|---|---|---|
| Books | Istituto di chimica e tecnologie inorganiche e dei materiali avanzati | edifico 6 (Browse Shelf) | 1 | Available | Biblioteca |
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