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Lee, Hong H.

Fundamentals of microelectrinics processing / Hong H. Lee - Singapore : McGrew-Hill Inc., c1990 - XVI, 514 p., [7]p. di tabelle : ill. ; 24 cm. - McGraw-Hill chemical Engineering series .

incluse bibliografia e indice

ISBN: 0070370567

Subjects--Topical Terms:
microelectronics processingn

LC Class. No.: TK7874.L34

Dewey Class. No.: 621.381'5-dc20