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Wasa, Kiyotaka

Handbook of sputter deposition technology : principles, technology and applications / by Kiyotaka Wasa, Shigeru Hayakawa - Park Ridge : Noyes Publications, c1992 - XII, 304 p. : ill. ; 24 cm.

ISBN: 0815512805

Subjects--Topical Terms:
Cathode sputtering (Plating process)
Thin films

LC Class. No.: TS695.W37

Dewey Class. No.: 621.3815'2