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Wasa, Kiyotaka

Handbook of sputter deposition technology : principles, technology and applications / by Kiyotaka Wasa, Shigeru Hayakawa - Park Ridge : Noyes Publications, c1992 - XII, 304 p. : ill. ; 24 cm.

0815512805


Cathode sputtering (Plating process)
Thin films

TS695.W37

621.3815'2

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