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Handbook of sputter deposition technology : principles, technology and applications /

by Wasa, Kiyotaka
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Authors: Hayakawa, Shigeru Published by : Noyes Publications, (Park Ridge : ) Physical details: XII, 304 p. : ill. ; 24 cm. Subject(s): Cathode sputtering (Plating process) | Thin films Year : 1992
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Item type Location Call Number Copy Status Notes Date Due
Books Istituto di chimica e tecnologie inorganiche e dei materiali avanzati edifico 6 (Browse Shelf) 1 Available Biblioteca

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